Recent salaries shared by Senior Software Engineer at MKS Instruments
Job Title | Years of Experience
Total Pay
Base • Additional pay
Location
Date submitted
Job Title | Years of Experience
Location
Date submitted
Total Pay
Base • Additional pay
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MKS Instruments pay FAQs
- The average salary for Senior Software Engineer is $208,541 per year (estimate) in US, which is 36% higher than the average MKS Instruments salary of $152,840 per year (estimate) for this job.
- MKS Instruments employees working as Senior Software Engineer in US have attributed a compensation and benefits rating of 4 out of 5 stars, based on 3 ratings. This is in line with the average of Senior Software Engineer professionals at MKS Instruments worldwide.
- The salary trajectory of a Senior Software Engineer ranges between locations and employers. The salary starts at $153,318 per year (estimate) and goes up to $384,632 per year (estimate) for the highest level of seniority.
- The estimated average salary for a Senior Software Engineer at MKS Instruments is $208,541 per year or $100 per hour, but some professionals have reported earning up to roughly $324,442 per year (90th percentile). The typical pay range is between $167,293 (25th percentile) and $264,281 (75th percentile) annually. This is based on 7 salaries submitted by MKS Instruments Senior Software Engineer professionals on Glassdoor, as of Jul 2026.
- Senior Software Engineer professionals typically earn between $80 and $127 per hour.
- Senior Software Engineer professionals typically earn between $13,941 and $22,023 monthly.
